• Dongguan ZHIK Energy Technology Co., Ltd.
    Customer one
    Good quality, fast ship, highly recommend
  • Dongguan ZHIK Energy Technology Co., Ltd.
    Customer TWO
    The texture is very good. No problem with current use, very good. The operation is very simple and cost-effective
Contact Person : Eilene
Phone Number : +86 15382821093
WhatsApp : +8615382821093

PECVD Laboratory Tube Furnace Vertical Sliding Rotary 1350 Degree

Place of Origin China
Brand Name ZHIK
Certification CE IOS
Model Number ZK-CVD1400
Minimum Order Quantity 1 Piece
Price USD4000-6000/Piece
Packaging Details Wooden packing
Delivery Time 24
Payment Terms L/C, D/A, D/P, T/T, Western Union, MoneyGram
Supply Ability 15set/month
Product Details
Model ZK-CVD1400 Power 5KW
Voltage 220/380V Control Precision +/- 1 ℃
Rated Temperature 1350 ℃ Dimensions 610*490*800mm(L*W*H)
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Laboratory Tube Furnace


High Temperature tube furnace


Vertical Sliding Rotary Tube Furnace

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Product Description

High Temperature CVD 1200C 1400C 1600C 1700C 1800C Vertical Sliding Rotary PECVD Tube Furnace

The CVD system consists of a gas supply system + a tube furnace + a gas extraction system. The maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, and 1700 degrees. The heating zone can be single temperature zone, dual temperature zone, three temperature zone, etc., and the ultimate vacuum It can reach 10-3Pa. The air supply system can be adjusted by a proton flow meter or a float flow meter. The number of gas mixing channels can be 2 channels, 3 channels, 4 channels, and 5 channels.

Heating element

(1) The thickness d of the hot end of the silicon carbide rod is 14mm, 12MM used by general manufacturers, the heating end is thick, not easy to bend, the surface load of the rod is low, and the service life is long. (2) The length of the cold end of m is 210mm, and the general manufacturer uses 180mm. The long cold end has a low top temperature. (3) The densely oxidized amorphous film on the surface of silicon carbide rods can better protect the carbon rod
PECVD Laboratory Tube Furnace Vertical Sliding Rotary 1350 Degree 0
Swedish Kanthal A1 resistance wire
(1), the surface temperature can reach 1420 ℃ (2) The surface is stainless steel (very bright, pay attention when customers identify it), will not rust, and will not drop slag even if it is used for a long time. (3) , Kanthal resistance wire data download (4) Kanthal resistance wire website: www.kanthal.com (5), resistance balance, temperature field balance is good